2014年7月20日 星期日

km

Equipment structure
EBAC and EBIC system mount in nProber II system. The system consists of ultra high gain amplification system, an E-beam scan control system, cables, interface HW, and software interface to contol it all.

Theory

The EBIC technique uses the E-beam to induce a charge into a PN junction. A pre-amplifier is connected to the sample or a probe tip and an image is gathered through this channel as the E-beam on    

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